The resolution of the measurements are ~0.5µm in the lateral (X, Y) plane and ~1nm in the height (Z) plane.  This allows microfeatures and large scale topographic variations to be monitored in detail.

Surface metrology data is presented in the form of pseudo-color height maps, 3D images, line profiles and surface roughness parameters (e.g. Ra, Rz).

• Height maps, 3D images and movies to illustrate the surface topography
• Profilometry - Measurement of feature heights / depths on the nm - mm scale using line profiles
• Surface roughness parameters -  including Sa - mean surface roughness; Sp - highest peak of the surface; Sv - deepest valley; Sy - total height between highest peak and deepest hole; Sz - mean of distance between the five highest peaks and five deepest holes
• Measurement of transparent film thickness in the 0.2µm - 50µm range.

Typical Applications

• Characterization of surface defects, stains and residues on metals, glasses and polymers
• Measurement of coating film thickness and uniformity on arterial stents
• Monitoring the effect of acid erosion on human tooth enamel
• Measurement of wear scars in tribological studies.

Typical Industries using White Light Interferometry

• Healthcare
• Medical Devices
• Printing
• Packaging
• Semiconductors
• Electronics
• Aerospace
• Automotive.